




| Physical Property | COMPOL 80 |
|---|---|
| Percent Silica (wt%) | 40 |
| Specific gravity | 1.3 |
| pH | 10.2 |
| Average Particle Size (nm) | 72 |
| Physical Property | 203Z | 204H |
|---|---|---|
| pH | 3.4 | 3.4 |
| Average particle size(um) | 1.30 | 0.85 |
| Specific gravity | 1.165 | 1.163 |
| Polishing rate(g/5min) | 0.12 | 0.08 |
| Surface Roughness (Ra) (nm) | 24 | 23 |